Cost-efficiency is one of the most frequent keywords in the health-care sector. In daily life, products such as instruments for diagnostics sample collection and analysis as well as for therapies, surgery etc. are disposable and made of polymeric materials. Materials for single-use products in life science applications are thus generally heat sensitive. Post treatments such as tailoring of surfaces to create a specific feature should occur without excess heat and unnecessary chemical exposure. ALD is a flexible process and many low temperature processes are available for making controlled surface structures at temperatures that do not jeopardize the performance of coated substrates such as thermoplastic polymer components.